Fabrication of Cu-encapsulated Carbon Nanotube Inductors

Title
Fabrication of Cu-encapsulated Carbon Nanotube Inductors
Authors
이병철이정언최양규윤준보
Keywords
MEMS; Carbon nanotube; interconnects; inductor; electroplating
Issue Date
2007-05
Publisher
NSTI Nanotech 2007
Citation
VOL 1, 45-48
URI
http://pubs.kist.re.kr/handle/201004/31132
Appears in Collections:
KIST Publication > Conference Paper
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