Thickness-controlled Metal Nanoscale Etch for Proposed Metal Nanowires Fabrication

Title
Thickness-controlled Metal Nanoscale Etch for Proposed Metal Nanowires Fabrication
Authors
이병철김무현신현준문성욱
Keywords
NEMS; nanoscale etch; metal nanowires; galvanic displacement; selective wet etching
Issue Date
2007-05
Publisher
NSTI Nanotech 2007
Citation
VOL 1, 279-282
URI
http://pubs.kist.re.kr/handle/201004/31133
Appears in Collections:
KIST Publication > Conference Paper
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