Reliable design and characterization of MEMS probe tip

Title
Reliable design and characterization of MEMS probe tip
Authors
이승훈추성일김진혁서호원한동철문성욱
Keywords
MEMS; Probe card; Electro-plating; FEM; Micro-spring; Area array
Issue Date
2007-05
Publisher
대한기계학회 2007년도 춘계학술대회
URI
http://pubs.kist.re.kr/handle/201004/31230
Appears in Collections:
KIST Publication > Conference Paper
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