Reduction of the Residual Compressive Stress of Tetrahedral Amorphous Carbon Film by Ar Background Gas during the Filtered Vacuum Arc Process

Title
Reduction of the Residual Compressive Stress of Tetrahedral Amorphous Carbon Film by Ar Background Gas during the Filtered Vacuum Arc Process
Authors
김태영이철승이영진이광렬채근화오규환
Keywords
ta-C; stress; Ar; atomic stress
Issue Date
2007-03
Publisher
Journal of applied physics
Citation
VOL 101, 023504-1-023504-5
URI
http://pubs.kist.re.kr/handle/201004/31438
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE