Nano patterning and structuring of InP(100) by low energy ion beam irradiation

Title
Nano patterning and structuring of InP(100) by low energy ion beam irradiation
Authors
박흥천최형욱최원국
Keywords
nano patterning; InP(100); low energy ion beam; self generating; low energy ion irradiation; nano dot; ripple; bradley-harper
Issue Date
2007-08
Publisher
Surface & coatings technology
Citation
VOL 201, 8469-8476
URI
http://pubs.kist.re.kr/handle/201004/31646
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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