Formation and interface analysis of Ti/Ni/Ti/Au ohmic contacts on n-type 6H-SiC

Title
Formation and interface analysis of Ti/Ni/Ti/Au ohmic contacts on n-type 6H-SiC
Authors
이정욱B.Angadi박흥천D.H. Park최지원최원국김태환
Keywords
Schottky contact; Ohmic contact; thermal annealing; SiC
Issue Date
2007-02
Publisher
Journal of the Electrochemical Society
Citation
VOL 154, H849-H852
URI
http://pubs.kist.re.kr/handle/201004/31663
ISSN
0013-4651
Appears in Collections:
KIST Publication > Article
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