Fabrication of stabilized piezoelectric thick film for silicon-based MEMS device

Title
Fabrication of stabilized piezoelectric thick film for silicon-based MEMS device
Authors
권태윤김용범엄길호윤대성이홍림김태송
Keywords
piezoelectric thick film; electromechanical properties
Issue Date
2007-09
Publisher
Applied physics. A, Materials science & processing
Citation
VOL 88, NO 4, 627-632
URI
http://pubs.kist.re.kr/handle/201004/31688
ISSN
0947-8396
Appears in Collections:
KIST Publication > Article
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