Reliable design and electrical characteristics of vertical MEMS probe tip

Title
Reliable design and electrical characteristics of vertical MEMS probe tip
Authors
이승훈추성일김진혁한동철문성욱
Keywords
reliable design; probe; MEMS; contact resistance
Issue Date
2007-03
Publisher
한국신뢰성학회지: 신뢰성응용연구
Citation
VOL 7, NO 1, 23-29
URI
http://pubs.kist.re.kr/handle/201004/31763
ISSN
17389895
Appears in Collections:
KIST Publication > Article
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