Ni Electrodeposition in Sub-micrometer Trenches

Title
Ni Electrodeposition in Sub-micrometer Trenches
Authors
김수길존 보네비치다니엘 조젤토마스 모팻
Keywords
Ni; Electrodeposition; trench; leveling
Issue Date
2007-09
Publisher
International Soiciety of Electrochemistry
URI
http://pubs.kist.re.kr/handle/201004/31775
Appears in Collections:
KIST Publication > Conference Paper
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