Crystal structure variation with excess Sb atoms of the δ-region SbTe binary phase change thin films

Title
Crystal structure variation with excess Sb atoms of the δ-region SbTe binary phase change thin films
Authors
김용태염민수성만영
Issue Date
2007-10
Publisher
Advanced Semiconductor Processes and Equipments (2007 Korea-Japan Joint Workshop)
URI
http://pubs.kist.re.kr/handle/201004/31911
Appears in Collections:
KIST Publication > Conference Paper
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