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dc.contributor.author김용태-
dc.contributor.author염민수-
dc.contributor.author성만영-
dc.date.accessioned2015-12-02T14:45:11Z-
dc.date.available2015-12-02T14:45:11Z-
dc.date.issued200710-
dc.identifier.other26187-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/31911-
dc.publisherAdvanced Semiconductor Processes and Equipments (2007 Korea-Japan Joint Workshop)-
dc.titleCrystal structure variation with excess Sb atoms of the δ-region SbTe binary phase change thin films-
dc.typeConference Paper-
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KIST Publication > Conference Paper
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