Photoimaging in Polymer Films by Dry Process with Chemical Amplification Lithography

Title
Photoimaging in Polymer Films by Dry Process with Chemical Amplification Lithography
Authors
안광덕강종희
Keywords
photoimaging; fluorescent patterning; t-BOC-quinizarin dye; acid-labile dye precursors
Issue Date
2007-06
Publisher
Imaging Conference JAPAN 2007: ICJ2007 Proceedings
URI
http://pubs.kist.re.kr/handle/201004/31945
Appears in Collections:
KIST Publication > Conference Paper
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