Deposition of LiNbO3 thin films for selective etching

Title
Deposition of LiNbO3 thin films for selective etching
Authors
김현준김달영하종윤강종윤성만영조봉희윤석진김현재
Keywords
Ferroelectric; Selective etching; LiNbO3; PLD
Issue Date
2006-12
Publisher
Journal of electroceramics
Citation
VOL 17, NO 2-4, 933-935
URI
http://pubs.kist.re.kr/handle/201004/31970
ISSN
1385-3449
Appears in Collections:
KIST Publication > Article
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