Thin film passivation of organic light emitting diodes by inductively coupled plasma chemical vapor deposition

Title
Thin film passivation of organic light emitting diodes by inductively coupled plasma chemical vapor deposition
Authors
김한기김상우김도근강재욱김명수조운조
Keywords
LED; ICP-CVD; SiNx; TOLED; Straight antenna
Issue Date
2007-04
Publisher
Thin solid films
Citation
VOL 515, NO 11, 4758-4762
URI
http://pubs.kist.re.kr/handle/201004/32017
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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