Low temperature O2 plasma-assisted wafer bonding of InP and a garnet crystal for an optical waveguide isolator

Title
Low temperature O2 plasma-assisted wafer bonding of InP and a garnet crystal for an optical waveguide isolator
Authors
노종욱양정수옥성해우덕하변영태전영민T. Mizumoto이우영이석
Keywords
wafer bonding; hydrophilic surface; plasma surface activation; optical waveguide isolator; garnets
Issue Date
2007-06
Publisher
Solid state phenomena
Citation
VOL 124-126, 475-478
URI
http://pubs.kist.re.kr/handle/201004/32113
ISSN
10120394
Appears in Collections:
KIST Publication > Article
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