Electrical properties of Sol-infiltrated PCW-PZT thick films on SiC thick films
- Electrical properties of Sol-infiltrated PCW-PZT thick films on SiC thick films
- 최기용; 최덕균; 김태송
- piezoelectric; MEMS; SiC; PZT; thick film; sol
- Issue Date
- Journal of ceramic processing research / International organization for ceramic processing
- VOL 8, NO 2, 156-160
- Appears in Collections:
- KIST Publication > Article
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