Guided Formation of a Sub-10 nm Silicide Dot Array on an Area Patterned by Electron-Beam Lithography

Title
Guided Formation of a Sub-10 nm Silicide Dot Array on an Area Patterned by Electron-Beam Lithography
Authors
Jung-Sub WiTae-Yon LeeHyun-Mi KimHyo-Sung LeeSung-Wook NamIl Jae Shin신경호Ki-Bum Kim
Keywords
dot array; silicide; e-beam lithography
Issue Date
2007-11
Publisher
Advanced materials
Citation
VOL 19, NO 21, 3469-3472
URI
http://pubs.kist.re.kr/handle/201004/32693
ISSN
0935-9648
Appears in Collections:
KIST Publication > Article
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