Adhesion characteristics of copper thin film deposited on PET substrate by electron cyclotron resonance-metal organic chemical vapor deposition

Title
Adhesion characteristics of copper thin film deposited on PET substrate by electron cyclotron resonance-metal organic chemical vapor deposition
Authors
전법주이상화이중기
Keywords
Electron Cyclotron Resonance; Adhesion; Roughness; PET; Copper
Issue Date
2008-01
Publisher
Surface & coatings technology
Citation
VOL 202, NO 9, 1839-1846
URI
http://pubs.kist.re.kr/handle/201004/32750
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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