Effects of Thermal Annealing on the Atomic Structure and the Residual Stress of Amorphous Carbon Films: A Molecular Dynamics Simulation

Title
Effects of Thermal Annealing on the Atomic Structure and the Residual Stress of Amorphous Carbon Films: A Molecular Dynamics Simulation
Authors
김경수이승철이광렬차필령
Keywords
분자동역학; 비정질 탄소박막; 잔유응력; 반경분포함수; Amorphous Carbon Films; Molecular Dynamics Simulation; Annealing; Stress reduction; Atomic
Issue Date
2008-04
Publisher
Journal of the Korean Physical Society
Citation
VOL 52, NO 4, 1272-1276
URI
http://pubs.kist.re.kr/handle/201004/32916
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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