Dual surface modifications of silicon surfaces for tribological application in MEMS

Title
Dual surface modifications of silicon surfaces for tribological application in MEMS
Authors
팜두쿠옹아르빈드 싱윤의성
Keywords
micro; friction; photolithography; silicon; tribology
Issue Date
2007-12
Publisher
KSTLE International Journal
Citation
VOL 8, NO 2, 26-28
URI
http://pubs.kist.re.kr/handle/201004/32919
ISSN
12299189
Appears in Collections:
KIST Publication > Article
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