Surface Morphology of Compressively Stressed Film Deposited on a Soft Polymer

Title
Surface Morphology of Compressively Stressed Film Deposited on a Soft Polymer
Authors
문명운Sk. F. Ahmed이진우이광렬
Keywords
wrinkle; dlc; compressive stress; pdms
Issue Date
2008-05
Publisher
ICMCTF2008
URI
http://pubs.kist.re.kr/handle/201004/32940
Appears in Collections:
KIST Publication > Conference Paper
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