Effect of Growth Temperature on the Properties of Hydrogenated Al-Doped ZnO Films

Title
Effect of Growth Temperature on the Properties of Hydrogenated Al-Doped ZnO Films
Authors
탁성주강민구임희진김동환이승훈김원목
Keywords
transparent conducting oxide; thin film; growth temperature; hydrogen doping; Al-Doped ZnO; rf magnetron sputter; TCO; Hydrogenated
Issue Date
2008-07
Publisher
Journal of the Korean Physical Society
Citation
VOL 53, NO 1, 282-287
URI
http://pubs.kist.re.kr/handle/201004/33115
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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