Copper Interconnection for Microelectronics

Title
Copper Interconnection for Microelectronics
Authors
김수길김재정
Keywords
Copper; Electrodeposition; Interconnection
Issue Date
2008-08
Publisher
International Conference on Microelectronics and Plasma Technology
Citation
, 52-52
URI
http://pubs.kist.re.kr/handle/201004/33235
Appears in Collections:
KIST Publication > Conference Paper
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