Properties of fluorine doped ZnO thin films deposited by magnetron sputtering

Title
Properties of fluorine doped ZnO thin films deposited by magnetron sputtering
Authors
윤희성이경석이택성정병기최덕균김동환김원목
Keywords
transparent conductig oxide; ZnO; Fluorine doping; fluorine doped ZnO film; magnetron sputtering; vacuum-annealing
Issue Date
2008-11
Publisher
Solar energy materials and solar cells : an international journal devoted to photovoltaic, photothermal, and photochemical solar energy conversion
Citation
VOL 92, NO 11, 1366-1372
URI
http://pubs.kist.re.kr/handle/201004/33281
ISSN
0927-0248
Appears in Collections:
KIST Publication > Article
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