High-throughput analysis of thin-film stresses using arrays of micromachined cantilever beams

Title
High-throughput analysis of thin-film stresses using arrays of micromachined cantilever beams
Authors
김현종한준현Roy Kaiser오규환Joost J. Vlassak
Keywords
high throughput analysis; thin film stress; cantilever; Fe-Pd; magnetic shape memory alloy
Issue Date
2008-05
Publisher
Review of scientific instruments
Citation
VOL 79, NO 4, 045112-1-045112-7
URI
http://pubs.kist.re.kr/handle/201004/33377
ISSN
0034-6748
Appears in Collections:
KIST Publication > Article
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