Development of PA-MOCVD machine with glow discharge : Application to the surface properties of metallic bipolar plate

Title
Development of PA-MOCVD machine with glow discharge : Application to the surface properties of metallic bipolar plate
Authors
권오집이영국한승희에릭플러리
Keywords
PAMOCVD; TiN; Glow discharge
Issue Date
2008-04
Publisher
대한금속재료학회
URI
http://pubs.kist.re.kr/handle/201004/33419
Appears in Collections:
KIST Publication > Conference Paper
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