A study on applicability of hydrofluoroethers as CFC-alternative cleaning agents

Title
A study on applicability of hydrofluoroethers as CFC-alternative cleaning agents
Authors
민혜진신진호배재흠김홍곤이현주
Keywords
trifluoroethoxytrimethylsilane; hexamethyldisilazane; hydrofluoroethers; alternative cleaning agents; cleaning evaluation; 2,2,2-trifluoroethanol
Issue Date
2008-09
Publisher
청정기술; Clean technology.
Citation
VOL 14, NO 3, 184-192
URI
http://pubs.kist.re.kr/handle/201004/33719
ISSN
1598-9712
Appears in Collections:
KIST Publication > Article
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