A study on applicability of hydrofluoroethers as CFC-alternative cleaning agents
- A study on applicability of hydrofluoroethers as CFC-alternative cleaning agents
- 민혜진; 신진호; 배재흠; 김홍곤; 이현주
- trifluoroethoxytrimethylsilane; hexamethyldisilazane; hydrofluoroethers; alternative cleaning agents; cleaning evaluation; 2,2,2-trifluoroethanol
- Issue Date
- 청정기술; Clean technology.
- VOL 14, NO 3, 184-192
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- KIST Publication > Article
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