Recent FIB applications for TEM works of thin films

Title
Recent FIB applications for TEM works of thin films
Authors
안재평김규현윤상원
Keywords
FIB; TEM; TEM sampling; Nano patterning; Contamination
Issue Date
2008-10
Publisher
Transworld Research Network
Citation
VOL 1, 281-297
URI
http://pubs.kist.re.kr/handle/201004/33817
ISSN
978-81-78
Appears in Collections:
KIST Publication > ETC
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