A novel spiral type MEMS power generator with shear mode piezoelectric thick film

Title
A novel spiral type MEMS power generator with shear mode piezoelectric thick film
Authors
송현철김상종문희규강종윤윤석진
Issue Date
2008-10
Publisher
5th International Workshop on Piezoelectric Materials and Applications (IWPMA)
URI
http://pubs.kist.re.kr/handle/201004/33830
Appears in Collections:
KIST Publication > Conference Paper
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