Characteristics and fabrication of nanohole array on InP semiconductor substrate using nanoporous alumina

Title
Characteristics and fabrication of nanohole array on InP semiconductor substrate using nanoporous alumina
Authors
정미이석변영태전영민김선호우덕하모선일
Keywords
InP nanohole; ICP-RIE; Photoluminescence
Issue Date
2008-04
Publisher
Microelectronics journal
Citation
VOL 39, NO 3-4, 526-528
URI
http://pubs.kist.re.kr/handle/201004/33890
ISSN
0026-2692
Appears in Collections:
KIST Publication > Article
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