Role of Al2O3 buffer layer in ZnO-based trransparent thin film transistors with HfO2 gate-insulator

Title
Role of Al2O3 buffer layer in ZnO-based trransparent thin film transistors with HfO2 gate-insulator
Authors
장성필송용원이세한이상렬주병권
Keywords
ZnO-TFT; HfO2; Al2O3; Interfacial layer
Issue Date
2008-10
Publisher
IS-TCO 2008
Citation
, 6-6
URI
http://pubs.kist.re.kr/handle/201004/33928
Appears in Collections:
KIST Publication > Conference Paper
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