Nano-patterning of Poly (methyl-methacrylate) Polymeric Surface and Effects of Pitch on Hydrophobicity and Tribological Properties

Title
Nano-patterning of Poly (methyl-methacrylate) Polymeric Surface and Effects of Pitch on Hydrophobicity and Tribological Properties
Authors
윤의성Phan Duc CuongArvind Singh김진석양성욱곽문규서갑양
Keywords
MEMS devices; AFM; surface modification
Issue Date
2008-05
Publisher
Society of Tribologists and Lubrication Engineers 63rd Annual Meeting and Exibition
URI
http://pubs.kist.re.kr/handle/201004/33983
Appears in Collections:
KIST Publication > Conference Paper
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