Nano-Scale Tribological Properties of Silicon Pillars with the Variation in Pitch

Title
Nano-Scale Tribological Properties of Silicon Pillars with the Variation in Pitch
Authors
Phan Duc CuongArvind Singh김진석양성욱윤의성
Issue Date
2008-10
Publisher
STLE/ASME International Joint Tribology Conference 2008
Citation
, 1-3
URI
http://pubs.kist.re.kr/handle/201004/33991
Appears in Collections:
KIST Publication > Conference Paper
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