Improved Dielectric Properties of ZrO2-Doped Ba0.6Sr0.4TiO3 Thin Films Deposited by Reactive Magnetron Co-Sputtering

Title
Improved Dielectric Properties of ZrO2-Doped Ba0.6Sr0.4TiO3 Thin Films Deposited by Reactive Magnetron Co-Sputtering
Authors
조광환강종윤윤석진이영백
Keywords
Dielectric loss; Tunable microwave device; Reactive co-sputtering; Ferroelectric
Issue Date
2008-11
Publisher
Journal of the Korean Physical Society
Citation
VOL 53, NO 5, 2378-2381
URI
http://pubs.kist.re.kr/handle/201004/34248
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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