MEMS Fabrication of Microchannel with Poly-Silicon Layer and Application to Microchip Electrophoresis

Title
MEMS Fabrication of Microchannel with Poly-Silicon Layer and Application to Microchip Electrophoresis
Authors
김태하전명석이강택
Keywords
MEMS Fabrication; Microchip Electrophoresis; Microchannel; Optical Slit; DRIE
Issue Date
2007-04
Publisher
제9회 한국 MEMS 학술대회
Citation
VOL 9, 598-601
URI
http://pubs.kist.re.kr/handle/201004/34398
Appears in Collections:
KIST Publication > Conference Paper
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