Effect of nitrogen implantation with low dose on thermomechanical properties and microstructure of Ge2Sb2Te5 films

Title
Effect of nitrogen implantation with low dose on thermomechanical properties and microstructure of Ge2Sb2Te5 films
Authors
박일목정정규양태열염민수김용태주영창
Keywords
Ge2Sb2Te5; nitrogen implantation; biaxial modulus; coefficient of thermal expansion; microstructure
Issue Date
2008-03
Publisher
Japanese journal of applied physics
Citation
VOL 47, NO 3, 1491-1495
URI
http://pubs.kist.re.kr/handle/201004/34399
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
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