Microstructure alanysis of In-Sb-Te thin films deposited by RF magnetron sputtering

Title
Microstructure alanysis of In-Sb-Te thin films deposited by RF magnetron sputtering
Authors
김청수김은태이정용김용태
Keywords
In-Sb-Te (IST); In3SbTe2; phase change; chalcogenide; TEM
Issue Date
2008-08
Publisher
The 14th International Symposium on the Physics of Semiconductor and Application (ISPSA)
Citation
, 309-309
URI
http://pubs.kist.re.kr/handle/201004/34410
Appears in Collections:
KIST Publication > Conference Paper
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