A transmission electron microscopy study on the crystallization of Sb-Se-Te thin films deposited by rf sputtering method

Title
A transmission electron microscopy study on the crystallization of Sb-Se-Te thin films deposited by rf sputtering method
Authors
윤종문선창우이정용김용태
Keywords
TEM; phase change memory; PRAM; crystallization; Sb-Se-Te
Issue Date
2008-08
Publisher
The 14th International Symposium on the Physics of Semiconductor and Applications (ISPSA)
Citation
, 308-308
URI
http://pubs.kist.re.kr/handle/201004/34412
Appears in Collections:
KIST Publication > Conference Paper
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