In-situ TEM Investigation on Nucleation and growth behavior of Si Thin Films

Title
In-situ TEM Investigation on Nucleation and growth behavior of Si Thin Films
Authors
김규현황진하안재평
Keywords
TEM; PDP; EELS
Issue Date
2008-11
Publisher
APMC9
Citation
VOL 1, NO 1, 95-95
URI
http://pubs.kist.re.kr/handle/201004/34687
Appears in Collections:
KIST Publication > Conference Paper
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