Electrical Properties of Amorphous Bi5Nb3O15 Thin Film for RF MIM Capacitors

Title
Electrical Properties of Amorphous Bi5Nb3O15 Thin Film for RF MIM Capacitors
Authors
조경훈최창학홍경표최주영정영훈남산강종윤윤석진이학주
Keywords
Bi5Nb3O15; high-κ; metal-insulator-metal (MIM) capacitor; temperature coefficient of capacitance (TCC); voltage coefficient of capacitance (VCC)
Issue Date
2008-07
Publisher
IEEE Electron Device Letters
Citation
VOL 29, NO 7, 684-687
URI
http://pubs.kist.re.kr/handle/201004/34710
ISSN
0741-3106
Appears in Collections:
KIST Publication > Article
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