Structure optimization and Characterization of a microbolometer for a CO2 detector

Title
Structure optimization and Characterization of a microbolometer for a CO2 detector
Authors
서호원김태근문성욱
Keywords
Microbolometer; CO2; NDIR; MEMS; infrared; detector; carbon dioxide
Issue Date
2008-02
Publisher
센서학회지
Citation
VOL 17, NO 1, 75-80
URI
http://pubs.kist.re.kr/handle/201004/34719
ISSN
1225-5475
Appears in Collections:
KIST Publication > Article
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