Demonstration of Micro-cantilever Devices using Pb(Zr,Ti)O3 Thin Films SOl-gel Processed on Nanocrystalline Diamond Thin Films

Title
Demonstration of Micro-cantilever Devices using Pb(Zr,Ti)O3 Thin Films SOl-gel Processed on Nanocrystalline Diamond Thin Films
Authors
정증현박종극윤주헌황규원이욱성백영준
Keywords
Nanocrystalline diamond film; Piezoelectric; Cantilever beam; Micro actuators and sensors
Issue Date
2008-12
Publisher
Materials Research Society
URI
http://pubs.kist.re.kr/handle/201004/34770
Appears in Collections:
KIST Publication > Conference Paper
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