Nanocrystalline Si formation inside SiNx nanostructures usingionized N₂ gas bombardment

Title
Nanocrystalline Si formation inside SiNx nanostructures usingionized N₂ gas bombardment
Authors
정민철박용주신현준변준석윤재진박용섭
Keywords
Si nanostructures; ion beam bombardment; XPS; SiNx; photoluminescence; Si 나노구조; 이온빔 입사; PL
Issue Date
2007-11
Publisher
한국진공학회지; Journal of the Korean Vacuum Society
Citation
VOL 16, NO 6, 474-478
URI
http://pubs.kist.re.kr/handle/201004/34907
ISSN
1225-8822
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE