Nanoscale ripples on polymers created by a focused ion beam
- Nanoscale ripples on polymers created by a focused ion beam
- 문명운; 한준현; Ashkan Vaziri; 허은규; 오규환; 이광렬; John W. Hutchinson
- ripple; polyimide; ion beam; FIB; maskless patterning; incident angle; polymer; nano pattern; nano patterning
- Issue Date
- VOL 20, 115301-1-115301-7
- We show that focused ion beam irradiation results in the creation of peculiar one- and
two-dimensional nanoscale features on the surface of polyimide—a common polymer in
electronics, large scale structures, and the automobile industry, as well as in biomedical
applications. The role of ion beam incident angle, acceleration voltage, and fluence on the
morphology of the structural features is systematically investigated, and insights into the
mechanisms of formation of these nanoscale features are provided. Moreover, by using the
maskless patterning method of the focused ion beam system, we have developed a robust
technique for controlled modification of the polymeric surface. The technique, which is
analogous to using a gray glass with varying darkness to control the radiation from the sun, but at a much smaller scale, enables the ion intensity and angle to be controlled at each surface point of the polymer, giving rise to structural surface features with desired shape and morphology.
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