Improved optical and electrical properties of rf sputtered Al doped ZnO films on polymer substrates by low-damage processes

Title
Improved optical and electrical properties of rf sputtered Al doped ZnO films on polymer substrates by low-damage processes
Authors
민형섭양민규이전국
Keywords
Al doped ZnO; rf sputter; Transparent conductive oxide; polymer substrate; low damage
Issue Date
2009-03
Publisher
Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
Citation
VOL 27, NO 2, 352-355
Abstract
Three types of low-damage radio-frequency rf magnetron sputtering processes—an interruptive process, a rotating cylindrical holder method, and an off-axis sputtering method—were designed and studied to reduce the film surface temperature during deposition. Low-damage sputtering processes were investigated to improve the resistivity and optical transmittance in the visible range of Al doped ZnO AZO thin films deposited on polymer substrates. In the case of the polyethersulfone substrate, AZO films with a resistivity of 1.0 10−3 cm and an optical transmittance of 75% were obtained by the rotating repeat holder method during rf sputtering.
URI
http://pubs.kist.re.kr/handle/201004/35020
ISSN
0734-2101
Appears in Collections:
KIST Publication > Article
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