Improved optical and electrical properties of rf sputtered Al doped ZnO films on polymer substrates by low-damage processes
- Improved optical and electrical properties of rf sputtered Al doped ZnO films on polymer substrates by low-damage processes
- 민형섭; 양민규; 이전국
- Al doped ZnO; rf sputter; Transparent conductive oxide; polymer substrate; low damage
- Issue Date
- Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
- VOL 27, NO 2, 352-355
- Three types of low-damage radio-frequency rf magnetron sputtering processes—an interruptive process, a rotating cylindrical holder method, and an off-axis sputtering method—were designed and studied to reduce the film surface temperature during deposition. Low-damage sputtering processes were investigated to improve the resistivity and optical transmittance in the visible range of Al doped ZnO AZO thin films deposited on polymer substrates. In the case of the polyethersulfone substrate, AZO films with a resistivity of 1.0 10−3 cm and an optical transmittance of 75% were obtained by the rotating repeat holder method during rf sputtering.
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