On-chip fabrication of ZnO-nanowire gas sensor with high gas sensitivity
- On-chip fabrication of ZnO-nanowire gas sensor with high gas sensitivity
- 안명원; 박경수; 허정훈; 김동완; 최경진; 박재관
- ZnO nanowire; gas sensor; NO2; on-chip fabrication
- Issue Date
- Sensors and actuators. B, Chemical
- VOL 138, 168-173
- ZnO-nanowire gas sensors were fabricated by a selective growth of nanowires on patterned Au catalysts
thus forming nanowire air bridges or ‘nanobridges’ between two Pt pillar electrodes. The gas sensing
properties of nanobridge gas sensors were demonstrated using a diluted NO2. The response, as a function
of temperature, was highest at 225 ◦C and was linearly increased with the concentration of NO2 in
the range of 0.5–3ppm and then showed a sign of saturation. Our sensor showed higher response compared
with different types of sensors including ZnO nanocrystals, Sn- and In-doped ZnO thin film, or ZnO
nanowires. The enhanced response was attributed to the additional modulation of the sensor resistance
due to potential barrier at nanowire/nanowire junctions as well as the surface depletion region of each
nanowire. Also nanobridge structure enabled fast recovery behavior because desorbed gas molecules can
be easily swept away from the surface of ZnO nanowire without re-adsorption.
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