On-chip fabrication of ZnO-nanowire gas sensor with high gas sensitivity

Title
On-chip fabrication of ZnO-nanowire gas sensor with high gas sensitivity
Authors
안명원박경수허정훈김동완최경진박재관
Keywords
ZnO nanowire; gas sensor; NO2; on-chip fabrication
Issue Date
2009-04
Publisher
Sensors and actuators. B, Chemical
Citation
VOL 138, 168-173
Abstract
ZnO-nanowire gas sensors were fabricated by a selective growth of nanowires on patterned Au catalysts thus forming nanowire air bridges or ‘nanobridges’ between two Pt pillar electrodes. The gas sensing properties of nanobridge gas sensors were demonstrated using a diluted NO2. The response, as a function of temperature, was highest at 225 ◦C and was linearly increased with the concentration of NO2 in the range of 0.5–3ppm and then showed a sign of saturation. Our sensor showed higher response compared with different types of sensors including ZnO nanocrystals, Sn- and In-doped ZnO thin film, or ZnO nanowires. The enhanced response was attributed to the additional modulation of the sensor resistance due to potential barrier at nanowire/nanowire junctions as well as the surface depletion region of each nanowire. Also nanobridge structure enabled fast recovery behavior because desorbed gas molecules can be easily swept away from the surface of ZnO nanowire without re-adsorption.
URI
http://pubs.kist.re.kr/handle/201004/35060
ISSN
0925-4005
Appears in Collections:
KIST Publication > Article
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