Defect effect on tribological behavior of diamond-like carbon films deposited with hydrogen diluted benzene gas in aqueous environment

Title
Defect effect on tribological behavior of diamond-like carbon films deposited with hydrogen diluted benzene gas in aqueous environment
Authors
이진우박세준문명운이광렬김석삼
Keywords
DLC; Hydrogen dilution; tribology; friction; defect-free; imperfection; humidity; Aqueous environment; Spallation wear
Issue Date
2009-05
Publisher
Applied surface science
Citation
VOL 255, NO 15, 7005-7011
Abstract
This study examined the friction and wear behavior of diamond-like carbon (DLC) films deposited from a radio frequency glow discharge using a hydrogen diluted benzene gas mixture. The DLC films were deposited on Si (1 0 0) and polished stainless steel substrates by radio frequency plasma-assisted chemical vapor deposition (r.f.-PACVD) at hydrogen to benzene ratios, or the hydrogen dilution ratio, ranging from 0 to 2.0. The wear test was carried out in both ambient and aqueous environments using a homemade ball-on-disk type wear rig. The stability of the DLC coating in an aqueous environment was improved by diluting the benzene precursor gas with hydrogen, suggesting that hydrogen dilution during the deposition of DLC films suppressed the initiation of defects in the film and improved the adhesion of the coating to the interface.
URI
http://pubs.kist.re.kr/handle/201004/35202
ISSN
0169-4332
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KIST Publication > Article
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