Polyimide surface modification by linear stationary plasma thruster

Title
Polyimide surface modification by linear stationary plasma thruster
Authors
최원국박동희
Keywords
linear stationary plasma thruster; surface modification of polymer; FCCL; peel strength; roll to roll vacuum coater; polyimide
Issue Date
2009-05
Publisher
Surface & coatings technology
Citation
VOL 203, 2739-2742
Abstract
Compared to the conventional circular type, the horse-track shaped proto-type linear stationary plasma thruster (LSPT)was designed and fabricated. A cathodewith LaB6 emitterwas adopted for trapped electron motion along ceramic wall as an electron source generally attached in the conventional cylindrical SPT. Nevertheless it has a little lower ion beamcurrent density of 0.5mA/cm2 than conventional cylindrical type SPT with 50mmdiameter, it was also proved very effective in surfacemodification of polymers. Reactive O2 + and N2O+ ion beamgenerated from LSPT can reduce thewetting angle 70° of polyimide (PI) down to the small angle less than 10°. 2-layer nonadhesive flexible copper clad laminate (FCCL) with Cu(8 μm)/Cu(200 nm)/Ni–Cr–Mo (20 nm)/PI(38 μm) was fabricated by using LSPT in 300 mm roll-to-roll vacuum coater. Peel strength was 0.66 kgf/cm for as-received sample and 0.42 kgf/cm after thermal test for 168 h at 150 °C, which shows a little higher performance than commercial ones.
URI
http://pubs.kist.re.kr/handle/201004/35206
ISSN
0257-8972
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KIST Publication > Article
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