Effect of silver doping on optical property of diamond like carbon films

Title
Effect of silver doping on optical property of diamond like carbon films
Authors
Sk. Faruque Ahmed문명운이광렬
Keywords
DLC; Optical properties; Ag-DLC; XPS; Thin Films; Silver; Diamond like carbon; X-ray photoelectron spectroscopy
Issue Date
2009-05
Publisher
Thin solid films
Citation
VOL 517, 4035-4038
Abstract
Diamond-like carbon (DLC) films were prepared for a protective coating on nitinol substrate by hybrid ion beam deposition technique with an acetelene as a source of hydrocarbon ions. An amorphous silicon (a-Si) interlayer was deposited on the substrates to ensure better adhesion of the DLC films followed by Ar ion beam treatment. The film thickness increased with increase in ion gun anode voltage. The residual stresses in the DLC films decreased with increase in ion gun anode voltage and film thickness, while the stress values were independent of the radio frequency (RF) bias voltage. The adhesion of the DLC filmwas improved by surface treatment with argon ion beam for longer time and by increasing the thickness of a-Si interlayer.
URI
http://pubs.kist.re.kr/handle/201004/35283
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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