Improvement of adhesion of DLC coating on nitinol substrate by hybrid ion beam deposition technique

Title
Improvement of adhesion of DLC coating on nitinol substrate by hybrid ion beam deposition technique
Authors
R RoySk. Faruque Ahmed이진우문명운이광렬전영하
Keywords
DLC; NiTi; Adhesion; Ar treatment; Si; Fracture; Hybrid ion beam deposition; Nitinol
Issue Date
2009-05
Publisher
Vacuum
Citation
VOL 83, NO 9, 1179-1183
Abstract
Diamond-like carbon (DLC) films were prepared for a protective coating on nitinol substrate by hybrid ion beam deposition technique with an acetelene as a source of hydrocarbon ions. An amorphous silicon (a-Si) interlayer was deposited on the substrates to ensure better adhesion of the DLC films followed by Ar ion beam treatment. The film thickness increased with increase in ion gun anode voltage. The residual stresses in the DLC films decreased with increase in ion gun anode voltage and film thickness, while the stress values were independent of the radio frequency (RF) bias voltage. The adhesion of the DLC film was improved by surface treatment with argon ion beam for longer time and by increasing the thickness of a-Si interlayer.
URI
http://pubs.kist.re.kr/handle/201004/35341
ISSN
0042-207X
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KIST Publication > Article
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